Shenzhen CRF Co., Ltd.

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Focus on R & D and manufacturer of plasma cleaning machine for 20 years

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4D intelligent integrated plasma activation equipment


A single processing system can carry 24 plasma spray guns of various types, full network matching, intelligent integration and integration, with more space-saving, more types of applications, with RS485/RS232, start-stop I/O control mode, convenient and fast , Reduce costs, apply to different occasions, meet a variety of different products and processing environments.
It can be installed in the customer's equipment production line in-line to reduce customer input costs;
Long service life, low maintenance and repair costs.


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Device details


4D intelligent integrated plasma processing system

Plasma power supply model


Power supply



800W*4set/ 25KHz

Power factor


Number of plasma spray guns


Processing height


Internal control mode

Digital control

External control mode

RS485/R5232.Analog communication port, start-stop I/O

Working gas

Compressed Air (0.4mpa)/N2(0.2mpa)

The cleaning method of plasma treatment can well remove the characteristics of slag

With the miniaturization of the diameter of HDI plates, the traditional chemical cleaning process can no longer meet the cleaning of the blind hole structure. The surface tension of the liquid makes it difficult for the liquid to penetrate into the hole, especially when processing the laser drilled micro blind hole plate. not good. At present, the hole cleaning processes applied to micro-buried blind holes mainly include ultrasonic cleaning and plasma cleaning. Ultrasonic cleaning is mainly based on the cavitation effect to achieve the purpose of cleaning. It belongs to wet processing, and the cleaning time is longer and depends on the cleaning solution. Decontamination performance increases the problem of waste liquid treatment.
The commonly used process at this stage is mainly the plasma cleaning process. The plasma treatment process is simple and environmentally friendly, with obvious cleaning effects (effects), and very effective for blind hole structures.
Plasma cleaning refers to the directional movement of highly activated plasma under the action of an electric field, and the gas solidification reaction occurs with the drilling dirt on the hole wall. At the same time, the generated gas products and some unreacted particles are discharged by the air pump . Plasma is generally divided into three steps in the blind hole cleaning of HDI boards. The first stage uses high-purity N2 to generate plasma, while preheating the printed board, so that the polymer material is in a certain active (chemical) state; second In the first stage, O2 and CF4 are used as the original gas, and O and F plasma are generated after mixing, which reacts with acrylic acid, PI, FR4, glass fiber, etc. to achieve the purpose of de-drilling; the third stage uses O2 as the original gas to generate plasma With reaction residues, the pore walls are cleaned.
In the plasma cleaning process, in addition to the plasma chemical reaction, the plasma also physically reacts with the surface of the material. The plasma particles knock off the atoms on the surface of the material or the atoms on the surface of the attached material, which is helpful for cleaning the etching reaction.

With the development of materials and technology, the realization of the buried blind hole structure will become smaller and more refined; when the blind hole is electroplated and filled, it will be more and more difficult to use the traditional chemical desmear method , And the cleaning method of plasma treatment can well overcome the characteristics of wet desmear, and can achieve a better cleaning effect on blind holes and micro holes, so as to ensure a good effect when blind holes are electroplated and filled ( fruit).

Wide plasma surface treatment machine (argon oxygen type)

Shenzhen Chengfeng Zhi made plasma cleaning machine

Top 500 enterprises choose brands for a long time

  • huaxing
  • jingtai
  • Bluesi
  • PAI

The reason for choosing us

20 years of independent R & D experience in top 500 enterprises, a number of technology patent certification.
Adopt imported components through EU CE certification so that you can use them without worry.

  • Professional R & D team

    Has a number of assembly engineers who have been engaged in the industry for more than ten years.

  • Advanced equipment

    Certification treats every equipment test

  • Strict quality control

    The equipment runs and debugs continuously for 24 hours before coming out.

  • Perfect service system

    A high-tech enterprise integrating R & D, manufacturing, production and sales of plasma equipment.

  • The service industry has a wide range of fields.

    Focus on plasma research and development for 20 years, serving a variety of industries

  • Special customizable equipment

    Make the equipment completely according to the customer's requirements.

A number of patent certificates, manufacturer strength certification

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CRF plasma——Focus on plasma 20 years