The effect of on-line plasma cleaning machine plasma treatment on the photoluminescence performance of silicone oil:
The development of display and light-emitting technology has attracted a lot of attention to white light emitting materials used in light sources. In recent years, it has been discovered that the photoluminescence (PL) of amorphous Si:C:0:H materials can cover the spectral range of 350~800nm, so it has become a promising candidate for white light emission.
In order to obtain white light emitting materials that may be used, people have explored the photoluminescence properties of a variety of amorphous Si:C:0:H materials, such as amorphous Si:C:O:H films prepared by reactive DC magnetron sputtering, Amorphous SiC, 0, thin film prepared by thermal evaporation deposition and melting-coating technology, hydrogenated amorphous silicon carbide 6-SiC:H) thin film prepared by reactive DC magnetron sputtering and plasma-enhanced chemical vapor deposition, and online A silicon-doped diamond-like carbon film prepared by plasma-enhanced chemical vapor deposition of a type plasma cleaner.
In the preparation of these films, it is usually necessary to use a higher deposition temperature or higher post-processing temperature, such as thermal evaporation deposition of a-SiC, O, the deposition temperature of the film is as high as 800 ℃, and the melting-coating technology is used to prepare a-SiC. O, the sintering temperature of the film is as high as 1300℃.

When luminescent materials are used in optoelectronic integration technology, such high temperatures may cause damage to other materials and devices. Therefore, it is very important to develop methods for preparing amorphous Si:C:0:H light-emitting materials at low temperatures. Silicone oil is a polymer material containing Si, C, 0, and H components. Due to its stable chemical properties, silicone oil is often used as an encapsulating material for light-emitting materials in light-emitting devices.
In recent years, research on amorphous Si:C:O:H light emitting materials has shown that the photoluminescence properties of the materials are related to the bond structure, defects, nanoparticles and clusters in the film. The bond structure of the silicone oil can be directly changed by the Ar plasma treatment of the online plasma cleaner. Therefore, the online plasma cleaner can be used to process the silicone oil to change the structure of the silicone oil or prepare the amorphous Si:C:O:H film to obtain Modified silicone oil or amorphous Si:C:O:H film with photoluminescence characteristics.
In the plasma of the online plasma cleaner, the discharge generates the active groups required to treat the silicone oil, and the ion energy that bombards the silicone oil can be controlled, and the plasma reaction can be combined with the ion bombardment effect, thereby changing the structure of the silicone oil and obtaining light Modified silicone oil or amorphous Si:C:O:H film with electroluminescent properties.