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How does the plasma surface treatment machine achieve the cleaning effect

How does the plasma surface treatment machine achieve the cleaning effect:
Plasma cleaning is one of the commonly used methods for plasma surface modification. The plasma surface treatment machine is a high-tech, using plasma to achieve effects that cannot be achieved by traditional cleaning methods. The plasma surface treatment machine uses gas as the cleaning medium, which can effectively avoid secondary pollution caused by the liquid cleaning medium. The plasma cleaner applies enough energy when using gas to ionize it into a plasma state. Plasma is an existence state of matter, and there are usually three states: solid state, liquid state and gas state. Plasma cleaners play an important role in current industrial production. Plasma cleaners are indispensable cleaning equipment in many enterprises. Plasma cleaning does not need to add any solvents, and no harmful substances are generated. It is also usually called environmentally friendly dry cleaning. So how does the plasma surface treatment machine achieve the cleaning effect?

The structural composition of the plasma surface treatment machine is mainly composed of two parts: one is the plasma generator, which is composed of integrated circuits, operation control, plasma generation power supply, gas source treatment, and safety protection. The second is the plasma processing device, which is composed of an excitation electrode, an excitation gas path, and so on. In some special cases of the ionosphere. The "active" components in the plasma include ions, electrons, active groups, excited nuclides, photons, etc. The plasma cleaner uses the properties of these active components to treat the surface of the sample to achieve cleaning, modification, and coating. , Photoresist ashing and other purposes.
The cleaning principle of the plasma surface treatment machine: the surface of the workpiece is treated by chemical or physical action to achieve the removal of contaminants at the molecular level (generally a few to tens of nanometers in thickness). The pollutants to be removed may be organic matter, epoxy resin, photoresist, oxide, microparticle pollutants, etc. Corresponding to different pollutants, different cleaning processes should be used. According to the cleaning principle, it can be divided into: physical cleaning and chemical cleaning.
The advantages of plasma cleaning: Plasma cleaning process can achieve real cleaning; compared with plasma cleaning, water washing cleaning is usually only a dilution process; compared with CO2 cleaning technology, plasma cleaning does not require other materials; compared with sandblasting cleaning In contrast, plasma cleaning can treat the complete surface structure of the material, not just the protruding part of the surface; it can be integrated online without additional space; low operating costs, environmentally friendly pretreatment process.
The plasma surface treatment machine acts on the surface of the material to recombine the chemical bonds of the surface molecules to form new surface features. For some special materials, the glow discharge of the plasma cleaner not only improves the adhesion, compatibility and wettability of the material, but also disinfects it. Regarding the plasma treatment time, the cross-linking, chemical modification, and etching that occur on the surface of the polymer treated by the ionomer are mainly due to the fact that the plasma causes the bond of the molecules on the polymer surface to be broken to generate a large number of free radicals. The experiment shows that with the extension of the plasma treatment time and the increase of the discharge power, the intensity of the generated free radicals increases, and enters a dynamic equilibrium after reaching a large point; when the discharge pressure is at a certain value, the intensity of the free radicals has a large value, that is, Under certain conditions, the low-temperature plasma reacts deeply to the polymer surface.
After plasma surface treatment, it may be due to the nature of the material itself, secondary pollution after treatment, and chemical reaction. The retention time of the surface energy after treatment is difficult to determine. After plasma surface treatment reaches a higher surface, immediately proceed to the next process to avoid the impact of surface energy attenuation.
The surface modification of the plasma surface treatment machine is an effective way to control the surface, and the energy and chemical properties of the substrate do not affect the bulk materials. The state in which plasma is an ionized gas is called the "fourth state of matter" and is composed of reactive particles such as electrons, ions, and free radicals. Plasma and solid interactions can be roughly divided into three subcategories: plasma etching or cleaning, in which material is removed from the surface; plasma activation, in which the surface is physically or chemically modified by substances present in the plasma; plasma coating , Where the material is deposited as a thin film on the surface. According to the conditions under which the plasma is generated, the plasma can be classified as vacuum or atmospheric plasma. Vacuum plasma processing is widely used in, for example, microelectronics applications, but online processes require atmospheric methods.
The pollutants removed may be organic matter, epoxy resin, photoresist, oxide, particulate pollutants, etc. In fact, the plasma surface treatment machine modifies the surface of the sample and removes organic matter on the surface at the same time, so that various materials can be bonded and coated. It is widely used in optics, optoelectronics, electronics, materials science, life science, polymer science, biomedicine, microfluidics and other fields.

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