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Design and research of high frequency and high voltage plasma generator:
As the fourth state of matter, plasma has received extensive attention and attention in the fields of energy, information materials, chemical engineering, medical treatment, and space physics due to its unique ion effect, excellent conductivity, and remarkable collective motion behavior. application. At the same time as plasma application and promotion, various fields also put forward more requirements on the design of plasma generators. Due to the large energy consumption and insufficient efficiency of traditional DC plasma generators, in order to meet the higher demands of modern industries, the design and research of new and efficient plasma generators becomes more and more important.
In response to the problems of traditional DC plasma generators, a high-frequency and high-voltage plasma generator is designed. The system is composed of a phase-shifted full-bridge PWM control module power drive module, a high-stability dual-resonance boost module and other modules, which can effectively improve the efficiency of the input power supply, greatly reduce the thermal loss of the drive circuit, and stabilize the plasma .
High frequency and high pressure plasma generation method
When a high-frequency electric field is applied to the induction coil, some of the charged particles generated by ionization of the air move at a high speed and collide with the gas atoms to form ionization and form a closed annular vortex on a cross section perpendicular to the direction of the magnetic field. According to the plasma eddy current effect, the higher the frequency of the current, the greater the rate of change of magnetic flux, the greater the induced electromotive force, the more pronounced the eddy current effect, the more stable the plasma beam. The plasma beam has a skin effect due to the existence of the eddy current effect of the high frequency alternating current.
The higher the current frequency, the smaller the penetration depth, the more pronounced the skin effect, and the more concentrated the charged particles in the plasma. In the surface layer, the electron density of the surface layer is increased, the self-absorption phenomenon (the phenomenon in which the spectral line radiated from the emitter is absorbed by its own atoms and the intensity of the center of the spectral line is weakened) is weakened, and the plasma is more stable.
Therefore, when the voltage at the discharge terminal and the frequency of the alternating current reach the relevant thresholds respectively, plasma with good stability and high electron density can be generated. The plasma can be stably generated by means of gas discharge under high frequency and high pressure. The system provides a control signal through a phase-shifted full-bridge control circuit, and is driven by a transistor to boost the input signal via a high-frequency resonant booster circuit to achieve stable plasma generation.
In the design of the high-frequency boost circuit, the system adopts a high-frequency resonance solid-state Tesla boost circuit based on LC resonance. The circuit is composed of a low-voltage input terminal, a main capacitor group, a resonant switch, a primary and secondary coil, and a discharge terminal. A high-voltage electric field can be formed at the discharge terminal to achieve plasma generation under high-frequency and high-voltage conditions. The high-frequency high-voltage plasma generator system provides a control signal through a phase-shifted full-bridge control circuit. Driven by a power transistor, the input signal is boosted by a high-frequency resonant booster circuit to achieve stable plasma generation and reduce drive tube consumption. And the improvement of input power efficiency.
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