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Research on low-temperature plasma surface treatment machine gas discharge plasma and its application

Research on low-temperature plasma surface treatment machine gas discharge plasma and its application:
The plasma characteristics of the low-temperature plasma surface treatment machine are closely related to the discharge characteristics, and the discharge characteristics are related to the excitation power, the discharge mode and the generation conditions. There are many forms of gas discharge that generate low-temperature plasma. According to the applied frequency, the main ones are: Optical discharge, capacitive coupling radio frequency discharge, inductive coupling radio frequency discharge, microwave discharge, atmospheric pressure glow discharge, spiral wave plasma, etc.

   There are many ways to obtain plasma. According to the different frequency applied, it can be divided into DC discharge, low frequency discharge, high frequency discharge, microwave discharge and other types. In the early stage of the development of low-temperature plasma, the discharge of low-pressure plasma surface treatment machines has been extensively and in-depth studied. Low air pressure has a relatively low breakdown voltage, which is easy to achieve stable discharge, and can also achieve uniform discharge in a larger scale and its active particle concentration is higher.
  In the air, there are usually two structures of plate electrode and cylindrical electrode. In order to achieve atmospheric pressure dielectric barrier discharge, at least one insulating medium (usually glass, quartz, ceramic, etc.) must be inserted into the air gap between the metal electrodes on both sides, and an alternating voltage source should be applied to the electrodes on both sides.
   When the applied voltage increases, the breakdown of the dielectric barrier discharge is similar to other discharges. The electrons are accelerated and gain energy under the action of an external electric field, and energy transfer occurs through collisions with surrounding atoms and molecules, causing the atoms and molecules to excite and ionize to produce an electronic avalanche. When the discharge air gap voltage is greater than the gas breakdown voltage, the air gap is broken down and discharge occurs.
Due to the existence of the dielectric plate between the electrodes, when a discharge occurs, a large amount of electric charge will move under the action of the electric field and accumulate on the dielectric plate to form a self-built electric field opposite to the applied electric field, which extinguishes the discharge and prevents the direction of the discharge. The transition of spark or arc discharge. The process of cylindrical electrode dielectric barrier discharge is similar to that of plate electrode dielectric barrier discharge.
The energy of the particles in the plasma of the low-temperature plasma surface treatment machine is generally a few to dozens of electron volts, which is greater than the binding energy of the polymer material. It can completely break the chemical bonds of organic macromolecules to form new bonds, but it is much lower than high-energy radioactive rays. , Only design the surface of the material without affecting the performance of the substrate.
In a low-temperature plasma in a non-thermodynamic equilibrium state, electrons have higher energy, which can break the chemical bonds of molecules on the surface of the material and increase the chemical reaction activity of particles (greater than thermal plasma). The temperature of neutral particles is close to room temperature. The advantages provide suitable conditions for the surface modification of heat-sensitive polymers.
Through the plasma surface treatment of the low-temperature low-temperature plasma surface treatment machine, the surface of the material undergoes various physical and chemical changes, or is etched and rough, or forms a dense cross-linked layer, or introduces oxygen-containing polar groups to make it hydrophilic Properties, adhesion, dyeability, and biocompatibility have been improved.
The development of gas discharge and its plasma technology is relatively rapid. The low-temperature plasma generated by gas discharge is important in the fields of material modification, hydrophilic treatment, adhesion enhancement, thin film growth, nano powder preparation, plasma display, and biotechnology. The application, and gradually showed good economic benefits, with great value and far-reaching prospects.

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