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What are the benefits of low-temperature plasma plasma treatment technology application range:
Plasma surface treatment equipment uses sufficient energy to ionize the gas into a plasma state, and uses the properties of these active components to treat the surface of the sample, thereby achieving the purpose of cleaning, modification, and photoresist ashing.
Low-temperature plasma technology has a wide range of applications, and the flow rate and concentration of gas are two very important factors for the application of gaseous pollutant treatment technology. Biological filtration and combustion technology can be applied to a higher concentration range, but it is limited by the flow rate of the gas. The low-temperature plasma technology has a wide application range for the flow rate and concentration of the gas, and the wide application of low-temperature plasma equipment is self-evident. The plasma technology process is simple. The adsorption method should consider the regular replacement of the adsorbent, which may cause secondary pollution during desorption; the combustion method requires a high operating temperature; the biological method must strictly control the pH, temperature and humidity conditions to suit the growth of microorganisms. The low-temperature plasma technology better overcomes the deficiencies of the above technologies. The reaction conditions are normal temperature and pressure, the reactor structure is simple, and the low-temperature plasma equipment can eliminate mixed pollutants at the same time (in some cases, it also has a synergistic effect). Secondary pollution, etc. In terms of economic feasibility, the low-temperature plasma reaction device itself has a single and compact system structure. In terms of operating costs, microscopically speaking, because the discharge process only increases the electron temperature while the ion temperature remains basically unchanged, the reaction system can maintain a low temperature. , Low-temperature plasma equipment not only has a high energy utilization rate, but also makes the equipment maintenance cost very low.
Low-temperature plasma technology has significant advantages in the treatment of gaseous pollutants. The basic principle is to generate high-energy electrons under the acceleration of the electric field. When the average energy of the electrons exceeds the chemical bond energy of the target molecules, the molecular bonds are broken to achieve the purpose of eliminating gaseous pollutants.
The benefits of plasma treatment are:
1. Before bonding is needed, clean the surface to change the surface tension. The reaction gas (O2/H2/N2/Ar, etc.) selected according to the process is ionized by the microwave plasma source, and then the ions and other substances and the surface organic pollutants chemically react to form exhaust gas which is pumped out by the vacuum pump. The surface of the material to be cleaned achieves the purpose of cleaning. After testing, the surface tension before and after cleaning has changed greatly, which is helpful for the next step of wire bonding or bonding.
2. Modify the surface of the material before surface spraying to improve the spraying effect. Some chemical materials, such as PP or other chemical materials, are themselves hydrophobic or hydrophilic. In the same way, the above-mentioned process gas is introduced, ionized, and reacted to modify the surface to make it hydrophilic or hydrophobic, which is convenient for spraying in the next step.
3. Plasma also has a spraying technology and thermal spraying drawing technology together, mainly for spraying large metal surfaces directly, with very good efficiency and effects.
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